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Integrated Pest Management (IPM) – Helicon CS

Web1 jan. 2024 · Before AlN deposition, the sputtering chamber was evacuated below 7 × 10 −5 Pa. The 99.999% pure aluminum metal and N 2 were used as the sputtering source. The … Web15 aug. 1999 · AlN thin films were prepared by the helicon plasma sputtering system (MPS, ULVAC, Tokyo, Japan) shown in Fig. 1. The system contains a sputtering chamber with a cathode and a radical cell, which is an apparatus generating radical atoms by using high frequency and a magnetic field. nutcracker statues for sale

NanoTechnology Platform - CRIS -Creative Reserch Institution

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